AFM High Aspect Ratio (HAR) Probes
Specially designed to scan the challenging structures on the samples surfaces
The HAR probe consists of a high aspect ratio pillar on the apex of the pyramid as depicted in the image to the left. This specialty probe is very useful for when there are high aspect ratio structures, such as narrow and deep openings or tall and dense structures.
Download Product Spec Sheets:
The High Aspect Ratio AFM Probes
- AFM application includes tapping mode
- Silicon body, silicon cantilever, and a silicon tip
- Compatible with all AFM’s in the market
- AFM tip is long and narrow with a radius less than 10 nm
- High-quality images produced by affordable probes
- Customization options are available for different dimensions and coating materials
Property / Tip | HAR R1 | HAR R2 | HAR R3 | HAR R4 |
---|---|---|---|---|
Tip Average Radius / r (nm) | <10 | <10 | <10 | <10 |
Resonance Freq. (kHz) | 80 ± 30 | 15 ± 5 | 150 ± 80 | 350 ± 150 |
Force Constant (N/m) | 2.7 ± (range 0.4-10) | 0.2 ± (range 0.04-0.7) | 7.4 ± (range 1-29) | 40 ± (range 7-160) |
Pillar Height / l (nm) | >500 | >500 | >500 | >500 |
Tip Height / TH (µm) | 17 ± 2 | 17 ± 2 | 17 ± 2 | 17 ± 2 |
Pillar Base Width / d2 (nm) | <200 | <200 | <200 | <200 |
Tip Base Shape | Pyramidal | Pyramidal | Pyramidal | Pyramidal |
Tip Material | C-Si | C-Si | C-Si | C-Si |
Application | Force Modulation | Contact | Tapping | Tapping |
Cantilever Shape | Rectangular | Rectangular | Rectangular | Rectangular |
Cantilever Length / L (µm) | 210 ± 10 | 500 ± 10 | 150 ± 10 | 100 ± 10 |
Cantilever Width / W (µm) | 30 ± 5 | 30 ± 5 | 30 ± 5 | 50 ± 5 |
Cantilever Thickness / T (µm) | 2.7 ± 1 | 2.7 ± 1 | 2.7 ± 1 | 2.7 ± 1 |
Half Cone Angle / Φ (°) | 20-25 | 20-25 | 20-25 | 20-25 |
Tilt Compensation / Θ (°) | 10 | 10 | 10 | 10 |
Tip Set Back / TSB (µm) | 15 ± 5 | 15 ± 5 | 15 ± 5 | 15 ± 5 |
Cantilever Material | C-Si | C-Si | C-Si | C-Si |
Backside Coating | None | None | None | None |
Frontside Coating | None | None | None | None |
Chip Length / L_Chip (mm) | 3.4 | 3.4 | 3.4 | 3.4 |
Chip Width / W_Chip (mm) | 1.6 | 1.6 | 1.6 | 1.6 |
Thickness (mm) | 0.3 | 0.3 | 0.3 | 0.3 |
Chip Material | Silicon | Silicon | Silicon | Silicon |